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Optia™ Wafer -- Features & Benefits
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Features
- No harmful crystal defects in the surface and bulk
- Comparable performance with Epi, at lower cost
- Better performance than annealed wafers at comparable cost
- Deep precipitate-free zone maintained throughout customer processing
- Robust IG protection through MDZ®
- Insurance against device yield upsets caused by metallic contamination * Built-in IG template through MDZ® eliminates need for customer oxygen out-diffusion and nucleation
Benefits
- No crystal defect related yields and reliability degradation
- Cost-effective starting material wafers, at lower cost alternative compared to other advanced wafers
- Superior-performance alternative to annealed wafers
- Improved device yield and reliability potential by eliminating all oxygen precipitates in device layer
- Insurance against device yield upsets caused by metallic contamination
- Improved customer cost of ownership through cycle time reduction
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Copyright © 2005 MEMC Electronic Materials, Inc. All rights reserved.
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