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Aegis™ -- Characteristics
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Aegis wafer characteristics are very much like traditional CMOS epi wafer characteristics:
- Lifetime is determined by the Epi deposition process
- Critical surface metals are low
- Very low OISF
- Epi process does not degrade global or site wafer flatness
- Thickness and resistivity uniformity are typically of P/P+ epi wafers

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Copyright © 2005 MEMC Electronic Materials, Inc. All rights reserved.
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