Search       Contact Us       Careers       Locations       Sitemap  
Standard CMOS Epi
Aegis™
Overview
Description
Characteristics
Features & Benefits
Power/Discrete Epi
Custom Epi

Aegis™
Literature
& Other (PDFs)
Application Note 3/00
Aegis™ Snapshot
Aegis™ -- Characteristics
Print This Page Contact Us Email This Page Bookmark This Page

Aegis wafer characteristics are very much like traditional CMOS epi wafer characteristics:

  • Lifetime is determined by the Epi deposition process
  • Critical surface metals are low
  • Very low OISF
  • Epi process does not degrade global or site wafer flatness
  • Thickness and resistivity uniformity are typically of P/P+ epi wafers


Enter your recipient's email address and click the button to email page:


Copyright © 2005 MEMC Electronic Materials, Inc.  All rights reserved.
Privacy Policy Legal Statement