Improve Device Performance, Reliability, and Cost of Ownership
Advanta™ wafers have low COPs (crystal-orginated pits) and high GOI (gate oxide integrity) performance. Advanta's annular region outside of a central vacancy core is free of any agglomerated defects. Advanta wafers can be enhanced using MEMC's Magic Denuded Zone® (MDZ®) thermal treatment. MDZ® produces robust internal gettering protection early in the IC fabrication process.
- Reduced COPs lead to higher reliability related to crystal defects
- Comparable performance with annealed wafers at much better cost
- Deep precipitate-free zone through MDZ® maintained throughout customer processing leads to improved device yield and reliability potential
- Built-in IG template through MDZ® eliminates need for customer oxygen out-diffusion and nucleation and reduces customer cycle time